Title: Challenges and Solutions for EEDF Measurements in Low Temperature Plasmas

Speaker: Dr. Steve Shannon, North Carolina State University

Date/Time: Monday, April 12, 2010, 10:00 am       

Location: CSRI Building/Room 137 (Sandia NM)

Brief Abstract: Electron energy distribution functions (EEDF's) define many of the global characteristics of low temperature plasmas due to the abundance of electron interactions with neutrals and ions that have complex energy dependent cross sections and threshold energies that can be much greater than the bulk electron temperature.  These measurements are particularly challenging in part because of the absence of a Maxwell-Boltzmann distribution shape, particularly at the high energy tail where the subtleties of the distribution can significantly influence plasma conditions.

In this presentation, we will highlight activities at NCSU that focus on measurement of EEDF's with a high degree of accuracy and energy range.  We will present our strategy for analysis, compare to state of the art techniques through simulation and experiment, and present a strategy to extend this work into several plasma systems of particular interest for materials synthesis and thin film manufacturing processes.

CSRI POC: Elebeoba May, (505) 844-9933