MEMS

A manufacturing technology that enables the development of electromechanical systems using batch fabrication techniques similar to those used in integrated circuit (IC) design. MEMS integrate mechanical elements, sensors, actuators and electronics on a silicon substrate.

Areas of Research:

• Electrophoretic Flow Simulations
  (Contact: Aidan Thompson)
• ChISELS - A Tool for Feature Length-scale Modeling: CVD & Plasma Etching
  (Contact: Lawrence C. Musson)
• Faethm
  (Contact: Richard L. Schiek)
• LIGA Processing, Polymer Dissolution Simulations
  (Contact: Aidan Thompson)
  

Program Contact: Scott A. Hutchinson and John Aidun

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Maintained by: Bernadette M. Watts
Modified on: May 6, 2008